PLASUS GmbH

PLASUS GmbH is a leading manufacturer of plasma monitor and process control systems for low-pressure as well as atmospheric pressure plasma applications in productions lines as well as R&D. Our turnkey EMICON series are most suitable for plasma analysis, optimisation of plasma processes as well as active process control, e.g. reactive sputtering, endpoint detection, quality control and fault detection. In addition to our main spectroscopic technology specific add-on modules for HIPIMS applications and simultaneous layer control are available. PLASUS provides also a variety of in-vacuum optics components with coating protection device and the spectroscopic analysis software SPECLINE for easy identification and analysis of spectral data with worldwide unique database for atoms, ions and molecules.