CMP Equipment Engineer

Field Service Engineer at the Boise ID Micron site supporting the SCREEN wet process tools, working in all of the fabs onsite. The tools supported onsite were all of the SU3X00 series tools as well as the SS3X00 series tools.Support install teams when new toolsets come onsite and assisted with any needs by either the facilities contractors or the install crew to help resolve any issues the can come up with the new tool install and to expedite the install to meet the agreed timeline. Work with the factory engineers and the factory in Japan to resolve any design issues and get the required parts and document changes completed so the install stays on the schedule agreed upon. Responsible for supporting the SCREEN toolsets once the install was complete including any modifications or repairs that came up during normal production. This could involve clearly communicating issues to the factory and working with the shift engineers and technician to troubleshoot to quickly resolve the issue.I was the onsite Engineer In Charge (EIC) in charge of the SST SU3800 platforms while working on the Intel site. I was responsible for supporting the shift FSE’s with issues that had been ongoing and required more advanced troubleshooting. I met daily and weekly with the customer to go over chronic issues that needed to be resolved and any upgrades or replacement of obsolescent parts. I was also expected to train the new incoming FSE’s to get them certified by the customer. This was done either locally or at the Dallas TX training center. I have attended factory training in Japan for the SU3X00, and SS3200 platforms. I have also attended company training in Dallas TX on the SS3000 and FC3100 platforms as well as Berlin Germany for the MKS Ozone supply cabinets.

I worked in the CVD/Thin Films/CMP area during the initial startup of the fab. I was responsible for setting up the three areas including design and layout. I was assigned the AMAT DCVD/MCVD Centura toolsets along with the TOK SOG tool to work with the vendor to install and qualify. I also worked with the tool owners to get the CMP and Sputter areas started and helped with installation of the AMAT Mirra CMP and DNS AS2000 scrubber tools along with the AMAT Centura RTA and Endura toolsets. I was responsible for supporting these tools during the initial fab qualification.Once the fab was online, I supported the CVD area as the A shift lead technician. I was responsible for going over the previous shift passdown and determining the priorities for the upcoming shift. I was also the point of contact for the equipment and process engineers, we would discuss any chronic tool issues and how we were going to resolve them quickly without impacting production. I worked on the AMAT Centura mainframe toolset along with the AMAT HDP/CVD and Producer toolsets as the A shift lead. Also supported the Novellus Concept 2 Sequel tools and the TOK/TEL Mk8 SOG toolsI have had AMAT factory training in Austin TX and Santa Clara CA for the Centura MCVD, DCVD, HDP and Producer Platforms. I have also had onsite training for the Novellus Concept 2 Sequel and training in Austin TX for the TEL Mk 8 platform.

I was responsible for the Thin Films/Wet Etch/Diffusion area in Micron’s R&D fab. I supported the AMAT P5000 MCVD, DCVD and Endura toolsets along with the WJ1000 BPSG tools and the AG RTA toolset. Was responsible for upgrading the AMAT toolset during the 6” to 8” fab conversion. Modified several P5000’s to allow them to run the 8” sized wafers. This involved changing out or modifying chambers to allow the larger wafers and upgrading the software to support the changes. Was put in charge of setting up and qualifying the first AMAT Centura MCVD tool in Fab 4.Worked with the Equipment Engineer on setting up an AMAT P5000 toolset to allow qualifying the TiN process, we were to get the process dialed in and released ahead of schedule and with the least amount of cost due to upgrades.

I worked initially in the Test area where I was responsible for installing and testing instrumentation on all types of solid rocket motors. This involved using a traveler and documentation to layout and then install the instrumentation and all associated wiring to a central connection point. After the items was fired I had to go back and recover the equipment and refurbish it for the next test. I moved to the Electronics Maintenance group where I was responsible for supporting all of the electronic equipment on the entire 50000 acre site which included all motor drives, CCTV system, NC Milling machines, several varieties of PLC controllers for the different control bunkers and anything else that was electronically controlled.